Waste Gas Treatment with STYRAX® (burn/wet) at the Point of Use

Process Waste Gas Treatment from CVD with STYRAX for 450mm
Process Waste Gas Treatment with STYRAX™ - Qualified for 450mm

STYRAX®, a DAS tool family for process waste gas abatement using burn/wet technology, is one of the latest developments within our waste gas treatment portfolio. It was specifically developed to manage demanding waste processes like CVD processes in the semiconductor and photovoltaic industries. Longer maintenance cycles increase the system’s uptime.

Operating Principle of STYRAX® Waste Gas Treatment Systems

Hazardous substances of process waste gases are treated directly from where they originate (Point-of-Use, POU). Like the well-established GIANT and UPTIMUM technology, the gases are burnt from top to bottom. Depending on the chemical composition of the waste gases, various reactions take place (oxidation, reduction, pyrolysis). A fluid wall/film prevents corrosion and deposition of particles in the reactor. In the washing column next to the reactor, soluble components are absorbed and particles suspended. The scrubbing liquid cools down and neutralizes combustion products such as hydrogen halides and all remaining residual gases meet strict German standards for air pollution law (TA Luft).

Proven Quality for Waste Gas Treatment with STYRAX
Proven Quality for Waste Gas Treatment with STYRAX

The following equipment options are available for all STYRAX systems:

  • Power Supply: 3 x 400 V/50 Hz or  3 x 208 V/60 Hz
  • Fuel Gas: NG, LPG
  • Oxidant: O2, CDA
  • Closed-loop system: Water, Lye
  • Heated feed lines and inlets
  • Process-Tool-Interface
  • Signal Tower
  • Drip Pan
  • Earthquake Safety Kit
  • Monitoring
  • SEMI S2 certification

Your advantages:

  • Optimized for demanding CVD processes
  • Especially low maintenance - high uptime
  • No inlet clogging
  • Low pressure drop
  • Small footprint
DAS Waste Gas Treatment STYRAX Operating Principle
Operating Principle of STYRAX Waste Gas Treatment Systems
Point of Use Waste Gas Treatment STYRAX INLINE
The Basic System for Waste Gas Treatment with STYRAX - STYRAX INLINE

The Basic Waste Gas Treatment System STYRAX INLINE

STYRAX INLINE is optimized for up to six independent inlets of semiconductor and photovoltaic process tools. It treats safely and efficiently waste gases and runs on diverse fuel gases and scrubbing liquids, with access for operation and maintenance from the front and back sides. Operation costs and general safety can be optimized with a process tool interface.

Features

  • Runs with different fuel gases
  • Low water consumption through closed-loop design

Technical Data

  • Dimensions (W x D x H):
    1110 mm x 675 mm x 2070 mm
  • Access to maintenance area on front and back side
  • Gas entry: max. 6 x DN25 or 4 x DN40
  • Gas outlet: DN100
STYRAX TWICE Dual Treatment of Process Waste Gases
STYRAX TWICE - Dual Waste Gas Treatment

Dual Waste Gas Treatment with STYRAX TWICE

STYRAX TWICE is a double-system with two independent burn/wet systems with a common control and media supply.  It  is optimized for up to eight independent inlets of semiconductor and photovoltaic  process tools. Different fuel gases and washing liquids can be used. Access for operation and maintenance is found at the front and back. Operation costs and general safety can be optimized with a process tool interface.

Features

  • Up to 4 independent inlets
  • Runs with different fuel gases
  • Low water consumption through closed-loop design
  • Option: ETL Certification

Technical Data

  • Dimensions (W x D x H):
    1865 mm x 675 mm x 2070 mm
  • Access to maintenance area on front and back side
  • Gas entry: max. 2 x 4 DN25 oder DN40
  • Gas outlet: 2 x DN100
Safe Waste Gas Treatment provided by DAS STYRAX DUO
Maximum Waste Gas Treatment with STYRAX DUO

Maximum Waste Gas Treatment with STYRAX DUO

STYRAX DUO is a double-reactor offering two scrubbing systems that can operate simultaneously. It is optimized for up to four independent inlets of semiconductor and photovoltaic  process tools. STYRAX DUO runs with different fuel gases and scrubber liquids. In case of malfunction or maintenance on one reactor, the other backs up the treatment of all waste gases (internal back-up), which ensures the equipment’s near 100 % operation time. Access for operation and maintenance is found in the front and back. Operation costs and general safety can be optimized with a process tool interface.

Features

  • Runs with different fuel gases
  • Low water consumption through closed-loop design
  • Available in two sizes
  • Option: ETL Certification

Technical Data

  • Dimensions (W x D x H):
    1865 mm x 675 mm x 2070 mm
  • Access to maintenance area on front and back side
  • Gas entry: max. 2 x 2 DN25 or DN40
  • Gas outlet: 2 x DN100
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+1 844 862-1662Give us a call! We are looking forward to providing a further information on our products for waste gas treatment.