Efficient Waste Gas Treatment by DAS for the Semiconductor Industry

In the early 1990s no appropriate and comprehensive technical solution had been available for waste gas treatment in the semiconductor industry. Back then as well as today many industrial and research production procedures use process gases and generate waste gases. These waste gases, considered greenhouse gases, are toxic and/or highly flammable and very often pose a significant risk to production facilities and the environment.

The semiconductor industry, for instance, uses perfluorocarbons, whose global warming potential is extremely high and therefore requires an efficient waste gas treatment.

Combining and transporting different gases into a fab’s central waste gas system might produce highly flammable and highly explosive gaseous mixtures, which in the past has occasionally caused the total loss of entire production facilities. Particles contained within gases may also cause exhaust blockages. To eliminate these risks, process waste gases need to be treated at the Point-of-Use” (POU) where harmful exhausts are abated immediately

  • DAS ensures a sustainable production in the Chip manufacturing industry by providing reliable waste gas treatment
  • Treatment of process waste gases with DAS-systems for the semiconductor industry
  • Waste Gas Treatment Systems by DAS for the semiconductor industry

Point-Of-Use Solutions for Waste Gas Treatment Made in Dresden

Since 1992 the POU equipment, developed and manufactured by DAS Environmental Expert GmbH, has mastered the task. DAS equipment can be used for practically all modern coating and etching equipment of the chip industry. Waste gases are treated safely and in an environmentally compatible way, with exhaust gases meeting the standards of the TA-Luft (German Clean Air Regulations).

DAS technology is based on a flexible, integrated product concept. The smallest equipment fits into a closet of less than a 1 square meter footprint. DAS technology is fully automated and sensor-controlled and meets the highest certified safety standards.

In the field of waste gas treatment, DAS currently holds 14 registered patents and additional usage rights for important technologies and technological solutions.

Your Application, our Solution for Waste Gas Treatment

Find the proper waste gas treatment system for your process here. Select the relevant process in the heading. By clicking on the indicated tool you will be directed to the specific product page.

ProductTechnologyETCHCVDEpitaxyWafer Cleaning


"We have trusted DAS waste gas abatement equipment for more than 15 years. The environmental experts from Dresden know our high quality standards. Their solutions as well as their professional service significantly contribute towards reaching these standard."

Jürgen Burek


“As an international microchip manufacturer we count on the high technological expertise of DAS. For many years we have depended on the treatment solutions of DAS Environmental Expert. A deep relationship has grown from this along with a commitment to the microelectronic-centre in Dresden.”

Eckhard Oetjen

Looking for Advice?

If you would like to get in contact with us, please use the following e-mail form or simply call us.

+1 844 862-1662Give us a call! We are looking forward to providing a further information on our products for waste gas treatment.