Waste Gas Treatment with GIANT (burn/wet)at the Point-Of-Use

Process Waste Gas Treatment GIANT
Process Waste Gas Treatment with GIANT

GIANT was specifically developed for treating the larger amounts of waste gases from CVD processes in the photovoltaic and flat panel display (TFT/LCD) industries. Being part of the burn/wet-technology based DAS tools, GIANT is optimized for up to six independent inlets from CVD process tools, runs on diverse fuel gases and scrubber liquids and has access for operation and maintenance on front and back side. Operation costs and general safety can be optimized with a process tool interface.

Operating Principle of the GIANT-Systems

Process waste gases are induced through a maximum of six separate inlets. Depending on the chemical composition of the waste gases, various reactions take place (oxidation, reduction, pyrolysis). A fluid wall/film prevents corrosion and deposition of particles in the reactor. In the washing column next to the reactor, soluble components are absorbed and particles suspended. The scrubbing liquid cools down and neutralizes combustion products such as hydrogen halides and all remaining residual gases meet the strict German standards for the air pollution law (TA Luft).  

The following equipment options are available for all GIANT systems:

  • Power Supply: 3 x 400 V/50 Hz or 3 x 208 V/60 Hz
  • Fuel Gas: NG, LPG
  • Oxidant: O2
  • Closed-loop system: Water, Lye
  • Heated feed lines and inlets
  • Process-Tool-Interface
  • Signal Tower
  • Drip Pan
  • Earthquake Safety Kit
  • Monitoring
Operating Principle Waste Gas Treatment DAS with GIANT
GIANT – Solution for Waste Gas Treatment from CVD Processes at the Point-Of-Use


  • Runs with different fuel gases
  • Low water consumption through closed-loop design

Technical Data

  • Dimensions (D x W x H): 
    2025 mm × 1530 mm × 2100 mm
  • Access to maintenance area on front and left side
  • Gas entry: max. 6 x DN25 or DN40
  • Gas outlet: DN100
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+1 844 862-1662Give us a call! We are looking forward to providing a further information on our products for waste gas treatment.