Waste Gas Treatment with AQUABATE (wet) at the Point-Of-Use

Point-Of-Use Wet Gas Treatment AQUABATE
AQUABATE - Point-of-Use Waste Gas Treatment

The AQUABATE product line completes DAS´ waste gas treatment portfolio. The well proven solution is a pure wet scrubber technology for efficient abatement of water-soluble harmful substances from process waste gases. The wet scrubber is employed mainly in the semiconductor industry, as a Point-of-Use (POU) wet treatment system. Installed closely behind the vacuum pumps, AQUABATE optimally protects the fab’s exhaust gas system from contamination and corrosion. Maintenance is quick and easy with access for operation and maintenance on the front and back sides. Other advantages are the high disposal efficiency, low investment cost and a small footprint. Operation costs can be optimized with a process tool interface.

Semi-Certification for Waste Gas Treatment with AQUABATE by DAS
Semi-Certification for Waste Gas Treatment with AQUABATE by DAS

The following equipment options are available for all AQUABATE wet scrubber systems:

  • Power Supply: 3 x 400 V/50 Hz or 3 x 208 V/60 Hz
  • Heated feed lines and inlets
  • Lye metering system
  • Process-Tool-Interface
  • Signal Tower
  • Drip Pan
  • Earthquake Safety Kit
  • Monitoring
  • SEMI S2 certification
DAS Principle Process Waste Gas Treatment AQUABATE
Operating Principle of the AQUABATE Wet Scrubber Product Line
AQUABATE EPI – Waste Gas Treatment at the Point-of-Use at Epitaxy Processes
AQUABATE EPI – Waste Gas Treatment at the Point-of-Use at Epitaxy Processes

Treatment of Process Waste Gases from Epitaxy with AQUABATE EPI

AQUABATE EPI was specifically designed to treat waste gases of epitaxy processes in the semiconductor industry. The scrubber meets the high safety standards that are necessary when using hydrogen as a process carrier gas. After the scrubbing process, the hydrogen is safely diluted to its lower explosion limit (LEL). The waste gases are introduced through up to three separate connections, specifically designed to prevent blockages. Both inlets and feed lines have an optional heating system. To increase washing efficiency the scrubbing liquid can be enhanced optionally with chemicals. 

Features

  • No Inlet clogging
  • Small Footprint

Technical Data

  • Dimensions (W x D x H):
    1020 mm x 930 mm x 1800 mm
  • Access to maintenance area on front and back side
  • Gas entry: max. 3 x DN40
  • Gas outlet: DN40
DAS Wet Scrubber AQUABATE FLEX
AQUABATE FLEX – modular Waste Gas Treatment at the Point-of-Use by wet scrubbing

Modular Waste Gas Treatment with AQUABATE FLEX

AQUABATE FLEX is a modular wet scrubber for efficient treatment of water-soluble components from waste gases of different applications. The gas inlets are specifically designed to prevent blockages. AQUABATE FLEX is available as one- or two-stage scrubber. Based on the compact and modular design, the wet scrubber will be optimized to customer requirements. Depending on the configuration of the scrubber the gas inlets can be optionally heated up to the scrubber stage or the washing liquid tank in order to avoid problems caused by condensing gas in the waste gas supply. To increase washing efficiency the scrubbing liquid can be enhanced optionally with chemicals.

Features

  • Available in 6 Variations
  • No inlet clogging
  • Small Footprint

Technical Data

  • Dimensions (W x D x H):
    1165 mm x 820 mm x 1944 mm
  • Access to maintenance area on front and back side
  • Gas entry: max. 4 x DN40 - DN150
  • Gas outlet: 2 x DN100 or DN150
AQUABATE COMBIBURN for Waste Gas Scrubbing in AP/RP-Epitaxy
AQUABATE COMBIBURN – combined Waste Gas Treatment at the Point-of-Use of AP/RP-Epitaxy

Combined Waste Gas Treatment for AP/RP-Epitaxy with AQUABATE COMBIBURN

AQUABATE COMBIBURN is a combination of AQUABATE EPI and ESCAPE PLUS technology and is a solution specifically developed to treat waste gases from epitaxy processes (Atmospheric and Reduced Pressure Epitaxy, AP/RP), and which employs the tried and tested ESCAPE technology to burn large amounts of hydrogen while meeting the highest safety standards.  

Gas scrubbing takes place in three steps (sample process): The AQUABATE EPI gas scrubber absorbs silicon chloride and HCI. SiH4, GeH4 und H2 combust in the ESCAPE PLUS burner apparatus. In ESCAPE PLUS’ subsequent scrubbing process SiO2 and GeO2 are absorbed. All process waste gases, including hydrogen, are completely abated.

Features

  • No inlet clogging
  • Small Footprint

Technical Data

  • Dimensions (W x D x H):
    1875 mm x 930 mm x 2070 mm
  • Access to maintenance area on front and back side
  • Gas entry: max. 3 x DN40
  • Gas outlet: DN100
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