Technology Portfolio for Point-of-Use Waste Gas Treatment

DAS Environmental Expert GmbH's portfolio currently includes four groups of technology for Point-of-Use waste gas treatment. The Company started in 1991 with Burn/wet abatement technology and continuously invested to develop market-specific solutions to expand their portfolio. Customer specific technology development is the company's current emphasis.

Burner/Wet Waste Gas Systems STYRAX
Burner/Wet Waste Gas Systems STYRAX

Burn/Wet Waste Gas Systems

Combining burners and wet scrubbers in one device is a DAS Environmental Expert GmbH speciality. This is the basis on which we have continuously developed the ESCAPE product line since the company was established. In the company plants, process exhaust gas contaminants are eliminated directly where they originate (point-of-use). To do this, the waste gases are passed into a ring-shaped burner. Depending on the chemical composition of the waste gases, various reactions take place there (oxidation, reduction, pyrolysis). The resulting soluble, gaseous, and solid substances are then bound by a suitable scrubbing liquid in the gas scrubber. This also ensures that the residual gas is rapidly cooled at the same time.

The burner/wet combination is used in various DAS Environmental Expert GmbH plants for disposing of a wide variety of environmentally harmful and/or hazardous waste gases. In the semiconductor industry, for example, various fluorine compounds, ammonia, silane, or hydrogen are used. Most recently, the STYRAX product line has been developed for waste gases generated by demanding CVD processes.

Burner Waste Gas System LARCH
Burner Waste Gas System LARCH

Dry Burn

In a burner, contaminants are removed from process waste gases. A fuel gas can be used to do this if necessary. Depending on the chemical composition of the waste gases, various reactions such as oxidation, reduction or pyrolysis take place in the waste gas burner.

The LARCH burner product family was specially developed for MOCVD processes in the LED industry. Hydrogen and ammonia are typical gases treated here.

The Aquabate Wet Scrubber Technology
The Aquabate Wet Scrubber Technology

Wet Scrubber

The wet scrubber is an efficient method of rinsing water-soluble contaminants from process waste gases. The point-of-use DAS Environmental Expert GmbH wet scrubbers are used successfully for purifying exhaust gases, mainly in the semiconductor industry. For this purpose they are installed at the shortest possible distance downstream of the vacuum pumps. The plants are easy to maintain and protect the Fab waste air system from contamination and corrosion.

Among other things, the AQUABATE product family treats typical gases from CVD and epitaxy processes in the semiconductor industry and MOCVD processes in the LED industry by wet scrubbing. These include, for example, silane, ammonia, nitrogen trifluoride, hydrogen and germane. The SALIX wet scrubber was developed especially for the waste gases from wafer cleaning in the semiconductor industry. This is where isopropyl alcohols, ammonia and hydrofluoric acid are treated.

EDC - Electrostatic filter for micro and nano particles
EDC - Electrostatic filter for micro and nano particles

Electrostatic Filters

Electrostatic filters use an electrical field to remove waste gases from particles. The DAS Environmental Expert GmbH plants, particularly the EDC product line electrostatic dust collector, were designed specifically for the reliable and efficient removal of even fine and extremely fine dusts and aerosols from waste gases such as those that are generated in the TFT industry.

To do this, the pre-cleaned process waste gases are first saturated with water with the aid of special nozzles and placed in a turbulent flow. The waste gases are then passed through aerodynamically optimised dust separation tubes. This is where the micro and nanoparticles in the gas are ionised and precipitated on an earthed film of scrubbing fluid on the irrigated wall. The dust is suspended into the scrubbing fluid, so that it can be safely disposed of.

The treatment of volatile organic compounds (VOCs) using the JUNIPER electrostatic condensate separator is based on the same principle. This was developed originally for the treatment of terpineols in the photovoltaic industry.

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